Ring Resonator based MOEMS Pressure Sensor on Circular Sensing Layer

N. Mamatha, B.S. Rakshitha, N. Chandra Shekar, H. Chetan, S. Suganya and M.R. Jyoti

The proposed design is a MOEMS based pressure sensor photonic crystal, designed on a Silicon circular diaphragm or sensing layer, the sensing layer is incorporated with a hexagonal ring resonator at the center. Photonic crystal holes are arranged in triangular style. Pressure load is exerted at the center of the sensing layer. Total deformation, normal strain and normal stress values are observed and tabulated. Pressure is mapped to the Refractive index (RI) values and are used in FDTD simulation tool in order to plot the resonant wavelength shift for each applied load. Comparison is done in terms of sensitivity and quality factor for ring resonator with one, two, and three hexagonal rings between the bus waveguides. Design with one ring is proven to be better with sensitivity of 450.17 nm/RIU and Q-Factor of 12,245.

Volume 11 | 09-Special Issue

Pages: 1035-1042

DOI: 10.5373/JARDCS/V11/20192669